Patents

September 30, 2015

Fiber Lasers: Scribing of Ceramic Wafers

View PDF, View PDF in German Scribing and micromachining of AlN and Al2O3 ceramics has been dominated by the use of CO2 lasers for 30 years, the simple reason being that the 10.6 μm wavelength has been the best suited to processing these types of materials. Nevertheless, feature size and finish quality of the ceramic substrates used for electronics applications […]